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Nucleation kinetics of electroless Cu deposition on ruthenium using glyoxylic acid as reducing agent
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Authors
Inoue, Fumihiro
;
Philipsen, Harold
;
van der Veen, Marleen
;
Van Huylenbroeck, Stefaan
;
Armini, Silvia
;
Struyf, Herbert
;
Tanaka, Tetsu
ISSN
0013-4651
Issue
14
Journal
Journal of the Electrochemical Society
Volume
161
Title
Nucleation kinetics of electroless Cu deposition on ruthenium using glyoxylic acid as reducing agent
Publication type
Journal article
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