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Fabrication and characterization of epitaxial Si-O superlattices
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Authors
Jayachandran, Suseendran
;
Delabie, Annelies
;
Lin, Dennis
;
Douhard, Bastien
;
Richard, Olivier
;
Meersschaut, Johan
;
Moussa, Alain
;
Bender, Hugo
;
Caymax, Matty
;
Vandervorst, Wilfried
;
Heyns, Marc
Conference
E-MRS Fall Symposium J: Alternative Semiconductor Integration in Si Microelectronics
Title
Fabrication and characterization of epitaxial Si-O superlattices
Publication type
Meeting abstract
Embargo date
9999-12-31
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