Fabrication and characterization of epitaxial Si-O superlattices

Jayachandran, Suseendran; Delabie, Annelies; Lin, Dennis; Douhard, Bastien; Richard, Olivier; Meersschaut, Johan; Moussa, Alain; Bender, Hugo; Caymax, Matty; Vandervorst, Wilfried; Heyns, Marc

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Fabrication and characterization of epitaxial Si-O superlattices

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2014

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Jayachandran, Suseendran

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Vandervorst, Wilfried

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Heyns, Marc

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Fabrication and characterization of epitaxial Si-O superlattices

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