Show simple item record

Fabrication and characterization of epitaxial Si-O superlattices

dc.contributor.authorJayachandran, Suseendran
dc.contributor.authorDelabie, Annelies
dc.contributor.authorLin, Dennis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorRichard, Olivier
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorMoussa, Alain
dc.contributor.authorBender, Hugo
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-22T02:20:07Z
dc.date.available2021-10-22T02:20:07Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24006
dc.sourceIIOimport
dc.titleFabrication and characterization of epitaxial Si-O superlattices
dc.typeMeeting abstract
dc.contributor.imecauthorJayachandran, Suseendran
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageJ26
dc.source.conferenceE-MRS Fall Symposium J: Alternative Semiconductor Integration in Si Microelectronics
dc.source.conferencedate15/09/2014
dc.source.conferencelocationWarsaw Poland
dc.identifier.urlhttp://www.emrs-strasbourg.com/index.php?option=com_abstract&task=view&id=276&day=2014-09-15&year=2014&Itemid=&id_season=12
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
29916.pdf
Size:
32.40Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record