Chemical vapor deposition processes for the fabrication of epitaxial Si-O superlattices

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Authors
Jayachandran, Suseendran; Delabie, Annelies; Maggen, Jens; Caymax, Matty; Loo, Roger; Meersschaut, Johan; Lenka, Hara; Vandervorst, Wilfried; Heyns, Marc
ISSN
0040-6090
Journal
Thin Solid Films
Volume
557
Title
Chemical vapor deposition processes for the fabrication of epitaxial Si-O superlattices
Publication type
Journal article
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