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Thick adhesive temporary bonding for high topography applications: spin-on versus dry bonding film processes
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Authors
Jourdain, Anne
;
Phommahaxay, Alain
;
Verbinnen, Greet
;
Guerrero, Alice
;
Bailey, Susan
;
Privett, Mark
;
Arnold, Kim
;
Miller, Andy
;
Rebibis, Kenneth June
;
Beyer, Gerald
;
Beyne, Eric
Conference
IEEE 64th Electronic Components and Technology Conference - ECTC
Title
Thick adhesive temporary bonding for high topography applications: spin-on versus dry bonding film processes
Publication type
Proceedings paper
Embargo date
9999-12-31
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