Publication:

Temporary bonding for high-topography applications: spin-on material versus dry film

Date

2014

Proceedings Paper

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Files

29384.pdf 2.95 MB

Author(s)

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Phommahaxay, Alain

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Verbinnen, Greet

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Guerrero, Alice

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Rebibis, Kenneth June

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Acq. date: 2026-04-06