Temporary bonding for high-topography applications: spin-on material versus dry film

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Authors
Jourdain, Anne; Phommahaxay, Alain; Verbinnen, Greet; Guerrero, Alice; Bailey, Susan; Privett, Mark; Arnold, Kim; Miller, Andy; Rebibis, Kenneth June; Beyer, Gerald; Beyne, Eric
Conference
IEEE 64th Electronic Components and Technology Conference - ECTC
Title
Temporary bonding for high-topography applications: spin-on material versus dry film
Publication type
Proceedings paper
Embargo date
9999-12-31
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