Publication:
Impact of ALD grown passivation layers on silicon nitride based integrated optic devices for very-near-infrared wavelengths
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1869 since deposited on 2021-10-22
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Acq. date: 2026-02-26
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1869 since deposited on 2021-10-22
1last month
1last week
Acq. date: 2026-02-26
Citations