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Improvement of cohesion strength in ULK OSG materials by pore structure adjustment

dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorVanstreels, Kris
dc.contributor.authorSavage, T.
dc.contributor.authorMatsunaga, K.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T02:39:46Z
dc.date.available2021-10-22T02:39:46Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24066
dc.sourceIIOimport
dc.titleImprovement of cohesion strength in ULK OSG materials by pore structure adjustment
dc.typeMeeting abstract
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage149
dc.source.endpage150
dc.source.conference23rd Materials For Advanced Metallization Conference - MAM
dc.source.conferencedate2/03/2014
dc.source.conferencelocationChemnitz Germany
imec.availabilityPublished - imec


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