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Scaling of BTI reliability in presence of Time-zero Variability – Pathfinding from planar FET to advanced 3-D FinFET nodes
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Authors
Kukner, Halil
;
Weckx, Pieter
;
Franco, Jacopo
;
Toledano Luque, Maria
;
Cho, Moon Ju
;
Kaczer, Ben
;
Raghavan, Praveen
;
Jang, Doyoung
;
Miyaguchi, Kenichi
;
Garcia Bardon, Marie
;
Catthoor, Francky
;
Van der Perre, Liesbet
;
Lauwereins, Rudy
;
Groeseneken, Guido
Conference
International Reliability Physics Symposium - IRPS
Title
Scaling of BTI reliability in presence of Time-zero Variability – Pathfinding from planar FET to advanced 3-D FinFET nodes
Publication type
Proceedings paper
Embargo date
9999-12-31
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