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Chemicals for the Chlorination of Gate Oxides

dc.contributor.authorMac Geary, M. J.
dc.contributor.authorBoeglin, H. J.
dc.contributor.authorLubbers, A.
dc.contributor.authorMertens, Paul
dc.contributor.authorVermeire, Bert
dc.date.accessioned2021-09-29T12:43:23Z
dc.date.available2021-09-29T12:43:23Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/240
dc.sourceIIOimport
dc.titleChemicals for the Chlorination of Gate Oxides
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceVacuum and Semiconductor Processing Conference
dc.source.conferencedate15/06/1994
dc.source.conferencelocationMünchen Germany
imec.availabilityPublished - open access


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