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Reliability challenges for barrier/liner system in high aspect ratio through silicon vias
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Authors
Li, Yunlong
;
Van Huylenbroeck, Stefaan
;
Van Besien, Els
;
Shi, Xiaoping
;
Wu, Chen
;
Stucchi, Michele
;
Beyer, Gerald
;
Beyne, Eric
;
De Wolf, Ingrid
;
Croes, Kristof
ISSN
0026-2714
Issue
9_10
Journal
Microelectronics Reliability
Volume
54
Title
Reliability challenges for barrier/liner system in high aspect ratio through silicon vias
Publication type
Journal article
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