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Growth techniques for high breakdown voltage in GaN/AlGaN HEMT on 200 mm Si (111) substrate by MOVPE
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Authors
Liang, Hu
;
Saripalli, Yoga
;
Van Hove, Marleen
;
Kang, Xuanwu
;
Vrancken, Evi
;
Zhao, Ming
;
Kandaswamy, Prem Kumar
;
Decoutere, Stefaan
;
Langer, Robert
Conference
17th International Conference on Metalorganic Vapor Phase Epitaxy - ICMOVPE XVII
Title
Growth techniques for high breakdown voltage in GaN/AlGaN HEMT on 200 mm Si (111) substrate by MOVPE
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