Solid phase epitaxy of GeSn alloys on silicon and integration in MOSFET devices

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Authors
Lieten, Ruben; Maeda, Tatsuro; Seo, Jin Won; Jevasuwan, Wipakorn; Hattori, Hiroyuki; Uchida, Noriyuki; Miura, Shu; Tanaka, Masatoshi; Fleischmann, Claudia; Vantomme, Andre; Johnson, Brett; Locquet, Jean-Pierre
Conference
High Purity and High Mobility Semiconductors 13
Title
Solid phase epitaxy of GeSn alloys on silicon and integration in MOSFET devices
Publication type
Proceedings paper
Embargo date
9999-12-31
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