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Group IV Epi processing, evolution in CMOS from 90 to 10nm node

dc.contributor.authorLoo, Roger
dc.contributor.authorDhayalan, Sathish Kumar
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorIke, Shinichi
dc.contributor.authorRondas, Dirk
dc.contributor.authorRosseel, Erik
dc.contributor.authorShimura, Yosuke
dc.contributor.authorSteenbergen, Johnny
dc.contributor.authorSun, Jianwu
dc.contributor.authorWang, Wei
dc.contributor.authorLanger, Robert
dc.date.accessioned2021-10-22T03:14:51Z
dc.date.available2021-10-22T03:14:51Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24165
dc.sourceIIOimport
dc.titleGroup IV Epi processing, evolution in CMOS from 90 to 10nm node
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRondas, Dirk
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorSteenbergen, Johnny
dc.contributor.imecauthorLanger, Robert
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.source.peerreviewno
dc.source.conferenceASM 2014 Users Meeting
dc.source.conferencedate25/09/2014
dc.source.conferencelocationMunich Germany
imec.availabilityPublished - imec


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