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Group IV Epi processing, evolution in CMOS from 90 to 10nm node
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1930 since deposited on 2021-10-22
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Acq. date: 2025-10-25
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Views
1930 since deposited on 2021-10-22
418item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations