Publication:
Group IV Epi processing, evolution in CMOS from 90 to 10nm node
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1938 since deposited on 2021-10-22
6last month
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Acq. date: 2026-04-27
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Views
1938 since deposited on 2021-10-22
6last month
1last week
Acq. date: 2026-04-27
Citations