Group IV Epi processing, evolution in CMOS from 90 to 10nm node

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Authors
Loo, Roger; Dhayalan, Sathish Kumar; Hikavyy, Andriy; Ike, Shinichi; Rondas, Dirk; Rosseel, Erik; Shimura, Yosuke; Steenbergen, Johnny; Sun, Jianwu; Wang, Wei; Langer, Robert
Conference
ASM 2014 Users Meeting
Title
Group IV Epi processing, evolution in CMOS from 90 to 10nm node
Publication type
Proceedings paper
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