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Conference contributions
Group IV Epi processing, evolution in CMOS from 90 to 10nm node
Publication:
Group IV Epi processing, evolution in CMOS from 90 to 10nm node
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Date
2014
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Dhayalan, Sathish Kumar
;
Hikavyy, Andriy
;
Ike, Shinichi
;
Rondas, Dirk
;
Rosseel, Erik
;
Shimura, Yosuke
;
Steenbergen, Johnny
;
Sun, Jianwu
;
Wang, Wei
;
Langer, Robert
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1932
since deposited on 2021-10-22
1
last month
Acq. date: 2026-02-24
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Statistics
Views
1932
since deposited on 2021-10-22
1
last month
Acq. date: 2026-02-24
Citations