Publication:

Group IV Epi processing, evolution in CMOS from 90 to 10nm node

Date

2014
Proceedings Paper
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dc.contributor.authorLoo, Roger
dc.contributor.authorDhayalan, Sathish Kumar
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorIke, Shinichi
dc.contributor.authorRondas, Dirk
dc.contributor.authorRosseel, Erik
dc.contributor.authorShimura, Yosuke
dc.contributor.authorSteenbergen, Johnny
dc.contributor.authorSun, Jianwu
dc.contributor.authorWang, Wei
dc.contributor.authorLanger, Robert
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRondas, Dirk
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorSteenbergen, Johnny
dc.contributor.imecauthorLanger, Robert
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.date.accessioned2021-10-22T03:14:51Z
dc.date.available2021-10-22T03:14:51Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24165
dc.source.conferenceASM 2014 Users Meeting
dc.source.conferencedate25/09/2014
dc.source.conferencelocationMunich Germany
dc.title

Group IV Epi processing, evolution in CMOS from 90 to 10nm node

dc.typeProceedings paper
dspace.entity.typePublication
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