Publication:

Feasibility of compensating for EUV field edge effects through OPC

Date

2014

Proceedings Paper

Simple item page Full metadata Statistics

Files

27866.pdf 7.43 MB

Author(s)

;

;

Fenger, Germain

;

Niroomand, Ardavan

;

;

Jonckheere, Rik

;

Hendrickx, Eric

;

Statistics

1946 since deposited on 2021-10-22

Acq. date: 2026-02-25