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Etch development for E-mode GaN power HEMT fabrication

dc.contributor.authorMannaert, Geert
dc.contributor.authorPosthuma, Niels
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorXu, Kaidong
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorParaschiv, Vasile
dc.date.accessioned2021-10-22T03:26:44Z
dc.date.available2021-10-22T03:26:44Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24195
dc.sourceIIOimport
dc.titleEtch development for E-mode GaN power HEMT fabrication
dc.typeMeeting abstract
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorPosthuma, Niels
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.orcidimecPosthuma, Niels::0000-0002-6029-1909
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.peerreviewno
dc.source.conferencePlasma Etch and Strip in Microtechnology - PESM
dc.source.conferencedate12/05/2014
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec


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