dc.contributor.author | Mannarino, Manuel | |
dc.contributor.author | Chintala, Ravi Chandra | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-22T03:27:04Z | |
dc.date.available | 2021-10-22T03:27:04Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24196 | |
dc.source | IIOimport | |
dc.title | A novel approach of using STM and NC-AFM to study narrow trenches in an oxide matrix | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Mannarino, Manuel | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | PT28 | |
dc.source.conference | 17th International Conference on Non-Contact Atomic Force Microscopy - NC-AFM | |
dc.source.conferencedate | 4/08/2014 | |
dc.source.conferencelocation | Tsukuba Japan | |
imec.availability | Published - open access | |