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Characterization of InP growth in nm-sized trenches by a combination of NC-AFM and STM

dc.contributor.authorMannarino, Manuel
dc.contributor.authorEyben, Pierre
dc.contributor.authorChintala, Ravi Chandra
dc.contributor.authorMerckling, Clement
dc.contributor.authorvan Dorp, Dennis
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T03:27:25Z
dc.date.available2021-10-22T03:27:25Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24197
dc.sourceIIOimport
dc.titleCharacterization of InP growth in nm-sized trenches by a combination of NC-AFM and STM
dc.typeMeeting abstract
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorvan Dorp, Dennis
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecvan Dorp, Dennis::0000-0002-1085-4232
dc.source.peerreviewno
dc.source.beginpageBBB3.01
dc.source.conferenceMRS Spring Meeting Symposium BBB: Advances in Scanning Probe Microscopy for Material Properties
dc.source.conferencedate21/04/2014
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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