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FEM simulation and measurement validation of a cMUT cell

dc.contributor.authorMao, Shengping
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-22T03:28:10Z
dc.date.available2021-10-22T03:28:10Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24199
dc.sourceIIOimport
dc.titleFEM simulation and measurement validation of a cMUT cell
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage7
dc.source.conference15th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE
dc.source.conferencedate6/04/2014
dc.source.conferencelocationGent Belgium
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6813847&contentType=Conference+Publications
imec.availabilityPublished - open access


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