Authors

Merckling, Clement; Waldron, Niamh; Jiang, Sijia; Guo, Weiming; Ryan, Paul; Collaert, Nadine; Caymax, Matty; Barla, Kathy; Heyns, Marc; Thean, Aaron; Vandervorst, Wilfried

Conference

Dielectrics for Nanosystems 6: Materials Science, Processing, Reliability and Manufacturing

Title

Selective-area metal organic vapor-phase epitaxy of InGaAs/InP heterostructures on Si for advanced CMOS devices

Publication type

Proceedings paper

Embargo date

9999-12-31