Authors

Milenin, Alexey; Boullart, Werner; Wen, Youxian; Quli, Farhat

ISSN

0021-4922

Issue

3

Journal

Japanese Journal of Applied Physics

Volume

53

Title

Study on processing step uniformity tuning during FET fabrication and sensor wafer response as a function of chuck temperature adjustment

Publication type

Journal article

Embargo date

9999-12-31