Publication:

15nm-WFIN high-performance low-defectivity strained-germanium pFinFETs with low temperature STI-last process

Date

2014
Proceedings Paper
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Author(s)

Mitard, Jerome  
;
Witters, Liesbeth  
;
Loo, Roger  
;
Lee, Seung Hun
;
Sun, J.W.
;
Franco, Jacopo  
;
Ragnarsson, Lars-Ake  
;
Brand, A.
;
Lu, X.
;
Yoshido, N.
;
Eneman, Geert  
;
Brunco, David
;
Vorderwestner, M.
;
Storck, P.
;
Milenin, Alexey  
;
Hikavyy, Andriy  
;
Waldron, Niamh  
;
Favia, Paola  
;
Vanhaeren, Danielle  
;
Vanderheyden, Annelies
;
Richard, Olivier  
;
Mertens, Hans  
;
Arimura, Hiroaki  
;
Sioncke, Sonja
;
Vrancken, Christa  
;
Bender, Hugo  
;
Eyben, Pierre  
;
Barla, Kathy  
;
Lee, Sun Ghil
;
Horiguchi, Naoto  
;
Collaert, Nadine  
;
Thean, Aaron  

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