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CDM ESD testing of a 3D TSV stacked IC chip
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Authors
Nagata, Nagata
;
Takaya, Satoshi
;
Ikeda, Hiroaki
;
Linten, Dimitri
;
Scholz, Mirko
;
Chen, Shih-Hung
;
Hasegawa, Keiichi
;
Shintani, Taizo
;
Sawada, Masanori
Conference
5th IEEE International 3D-TEST Workshop
Title
CDM ESD testing of a 3D TSV stacked IC chip
Publication type
Meeting abstract
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