Authors

Ohtani, Ryota; Yamamoto, Takashi; Janssens, Stoffel; Yamasaki, Satoshi; Koizumi, Satoshi

ISSN

0003-6951

Issue

23

Journal

Applied Physics Letters

Volume

105

Title

Large improvement of phosphorus incorportion efficiency in n-type chemical vapor deposition of diamond

Publication type

Journal article

Embargo date

9999-12-31