Publication:

CMP on SiGe materials – linking chemical and physical properties to design low defect and selective slurries

Date

2014

Proceedings Paper

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Author(s)

;

;

Leunissen, Leonardus H. A.

;

Ibrahim, Sheikh Ansar Usman

;

Statistics

1890 since deposited on 2021-10-22

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Acq. date: 2026-05-18