CMP on SiGe materials – linking chemical and physical properties to design low defect and selective slurries

Publication:

2014

Proceedings Paper

Author(s)

;

Siebert, Max

;

Leunissen, Leonardus H. A.

;

Ibrahim, Sheikh Ansar Usman

;

1885 since deposited on 2021-10-22

Acq. date: 2026-02-25