Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns

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Authors
Pathangi Sriraman, Hari; Gronheid, Roel; Van Den Heuvel, Dieter; Rincon Delgadillo, Paulina; Chan, BT; Van Look, Lieve; Bayana, Hareen; Cao, Yi; Her, YoungJun; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Somervell, Mark; Harukawa, Ryoto; Chikashi, Ito; Nagaswami, Venkat; D'Urzo, Lucia; Nealey, Paul
Conference
Micro and Nano Engineering Conference - MNE
Title
Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Publication type
Meeting abstract
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