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Defect detection in through silicon vias by GHz scanning acoustic microscopy: key ultrasonic characteristics
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Authors
Phommahaxay, Alain
;
De Wolf, Ingrid
;
Djuric, Tatjana
;
Hoffrogge, Peter
;
Brand, Sebastien
;
Czurratis, Peter
;
Philipsen, Harold
;
Beyer, Gerald
;
Struyf, Herbert
;
Beyne, Eric
Conference
IEEE 64th Electronic Components and Technology Conference - ECTC
Title
Defect detection in through silicon vias by GHz scanning acoustic microscopy: key ultrasonic characteristics
Publication type
Proceedings paper
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