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Atomic layer deposition of Ruthenium: a theoretical insight

dc.contributor.authorPhung, Quan
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorSwerts, Johan
dc.contributor.authorPierloot, Kristine
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-22T04:45:42Z
dc.date.available2021-10-22T04:45:42Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24387
dc.sourceIIOimport
dc.titleAtomic layer deposition of Ruthenium: a theoretical insight
dc.typeMeeting abstract
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.source.peerreviewno
dc.source.conference10th Congress of the World Association of Theoretical and Computational Chemists
dc.source.conferencedate5/10/2014
dc.source.conferencelocationSantiago de Chile Chile
imec.availabilityPublished - imec


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