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Challenges and solutions on pre-assembly processes for thinned 3D wafers with micro-bumps on the backside
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Authors
Podpod, Arnita
;
Demeurisse, Caroline
;
Rebibis, Kenneth June
;
Gerets, Carine
;
Phommahaxay, Alain
;
Capuz, Giovanni
;
Duval, Fabrice
;
Sleeckx, Erik
;
Struyf, Herbert
;
Miller, Andy
;
Beyne, Eric
;
Beyer, Gerald
Conference
16th IEEE Electronic Packaging Technology Conference - EPTC
Title
Challenges and solutions on pre-assembly processes for thinned 3D wafers with micro-bumps on the backside
Publication type
Proceedings paper
Embargo date
9999-12-31
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