Publication:
3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography
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2008 since deposited on 2021-10-22
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Acq. date: 2026-10-04
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Statistics
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2008 since deposited on 2021-10-22
3last month
3last week
Acq. date: 2026-10-04
Citations