3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography

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Authors
Qiu, Yang; Van Marcke, Patricia; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried
Conference
18th International Microscopy Conference - IMC18
Title
3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography
Publication type
Oral presentation
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