Publication:
3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography
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2005 since deposited on 2021-10-22
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Acq. date: 2026-08-09
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Statistics
Views
2005 since deposited on 2021-10-22
3last month
1last week
Acq. date: 2026-08-09
Citations