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3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography

dc.contributor.authorQiu, Yang
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T04:53:45Z
dc.date.available2021-10-22T04:53:45Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24405
dc.sourceIIOimport
dc.title3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography
dc.typeOral presentation
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.conference18th International Microscopy Conference - IMC18
dc.source.conferencedate7/09/2014
dc.source.conferencelocationPrague Czech Republic
imec.availabilityPublished - imec


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