dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Chew, Soon Aik | |
dc.contributor.author | Dekkers, Harold | |
dc.contributor.author | Toledano Luque, Maria | |
dc.contributor.author | Parvais, Bertrand | |
dc.contributor.author | De Keersgieter, An | |
dc.contributor.author | Van Ammel, Annemie | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Yoshida, Naomi | |
dc.contributor.author | Phatak, Anup | |
dc.contributor.author | Han, Keping | |
dc.contributor.author | Colombeau, Benjamin | |
dc.contributor.author | Brand, Adam | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Thean, Aaron | |
dc.date.accessioned | 2021-10-22T04:58:10Z | |
dc.date.available | 2021-10-22T04:58:10Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24415 | |
dc.source | IIOimport | |
dc.title | Highly scalable bulk FinFET devices with multi-VT options by conductive metal gate stack tuning for the 10-nm node and beyond | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Dekkers, Harold | |
dc.contributor.imecauthor | Parvais, Bertrand | |
dc.contributor.imecauthor | De Keersgieter, An | |
dc.contributor.imecauthor | Van Ammel, Annemie | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Thean, Aaron | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
dc.contributor.orcidimec | Parvais, Bertrand::0000-0003-0769-7069 | |
dc.contributor.orcidimec | De Keersgieter, An::0000-0002-5527-8582 | |
dc.contributor.orcidimec | Schram, Tom::0000-0003-1533-7055 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 56 | |
dc.source.endpage | 57 | |
dc.source.conference | VLSI Technology Symposium | |
dc.source.conferencedate | 9/06/2014 | |
dc.source.conferencelocation | Honolulu, HI USA | |
imec.availability | Published - open access | |