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F atoms interaction with nanoporous OSG low-k materials

dc.contributor.authorRakhimova, T.
dc.contributor.authorRakhimov, A.
dc.contributor.authorZyryanov, S.
dc.contributor.authorLopaev, D.
dc.contributor.authorMankelevich, Y.
dc.contributor.authorProshina, O.
dc.contributor.authorNovikova, N.
dc.contributor.authorKurchikov, K.
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T04:59:05Z
dc.date.available2021-10-22T04:59:05Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24417
dc.sourceIIOimport
dc.titleF atoms interaction with nanoporous OSG low-k materials
dc.typeMeeting abstract
dc.source.peerreviewno
dc.source.beginpageCC1.03
dc.source.endpage283
dc.source.conferenceMRS Spring Meeting Symposium CC: New Materials and Processes for Interconnects, Novel Memory and Advanced Display Technologies
dc.source.conferencedate15/03/2014
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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