Authors

Rincon Delgadillo, Paulina; Gronheid, Roel; Lin, Guanyang; Cao, Yi; Romo, Ainhoa; Somervell, Mark; Nafus, Kathleen; Nealey, Paul

Conference

SPIE Advanced Lithography 2014

Title

Kinetics of defect annihilation in directed self-assembly of block copolymers using chemically nano-patterned surfaces

Publication type

Meeting abstract