Show simple item record

Kinetics of defect annihilation in directed self-assembly of block copolymers using chemically nano-patterned surfaces

dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorGronheid, Roel
dc.contributor.authorLin, Guanyang
dc.contributor.authorCao, Yi
dc.contributor.authorRomo, Ainhoa
dc.contributor.authorSomervell, Mark
dc.contributor.authorNafus, Kathleen
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-22T05:05:07Z
dc.date.available2021-10-22T05:05:07Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24431
dc.sourceIIOimport
dc.titleKinetics of defect annihilation in directed self-assembly of block copolymers using chemically nano-patterned surfaces
dc.typeMeeting abstract
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorNafus, Kathleen
dc.source.peerreviewno
dc.source.conferenceSPIE Advanced Lithography 2014
dc.source.conferencedate23/02/2014
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record