Publication:

Thermal budget impact on HKMG Al2O3 and La-based stacks for 2x DRAM periphery transistors

Date

2014

Proceedings Paper

Simple item page Full metadata Statistics

Files

29109.pdf 412.73 KB

Author(s)

Ritzenthaler, Romain

;

;

Spessot, Alessio

;

Caillat, Christian

;

;

;

;

Noh, Kyung Bong

;

Aoulaiche, Marc

;

Arimura, Hiroaki

;

Horiguchi, Naoto

;

;

Statistics

1982 since deposited on 2021-10-22

Acq. date: 2026-03-17