Publication:

Thermal budget impact on HKMG Al2O3 and La-based stacks for 2x DRAM periphery transistors

Date

2014

Proceedings Paper

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Files

29109.pdf 412.73 KB

Author(s)

Ritzenthaler, Romain

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;

Spessot, Alessio

;

Caillat, Christian

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;

;

;

Noh, Kyung Bong

;

Aoulaiche, Marc

;

Arimura, Hiroaki

;

Horiguchi, Naoto

;

;

Statistics

1987 since deposited on 2021-10-22

3last month

Acq. date: 2026-10-13