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Thermal budget impact on HKMG Al2O3 and La-based stacks for 2x DRAM periphery transistors

dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorSchram, Tom
dc.contributor.authorSpessot, Alessio
dc.contributor.authorCaillat, Christian
dc.contributor.authorNa, Hoon Jo
dc.contributor.authorLee, Sun Ghil
dc.contributor.authorSon, Yunik
dc.contributor.authorNoh, Kyung Bong
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorFazan, Pierre
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-22T05:07:50Z
dc.date.available2021-10-22T05:07:50Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24436
dc.sourceIIOimport
dc.titleThermal budget impact on HKMG Al2O3 and La-based stacks for 2x DRAM periphery transistors
dc.typeProceedings paper
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorFazan, Pierre
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conferenceIEEE Workshop On Microelectronics And Electron Devices - WMED
dc.source.conferencedate18/04/2014
dc.source.conferencelocationBoise, ID USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6818721&sortType%3Ddesc_p_Publication_Year%26queryText%3Dritzenth
imec.availabilityPublished - open access


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