Authors

Rochus, Veronique; Samara, Vladimir; Vereecke, Bart; Soussan, Philippe; Onsia, Bart; Rottenberg, Xavier

Conference

15th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE

Title

2D micro-chamber for DC plasma working at low power

Publication type

Proceedings paper

Embargo date

9999-12-31