Ge-source vertical tunnel FETs using a novel replacement-source integration scheme

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Authors

Rooyackers, Rita; Vandooren, Anne; Verhulst, Anne; Walke, Amey; Simoen, Eddy; Devriendt, Katia; Locorotondo, Sabrina; Demand, Marc; Bryce, George; Loo, Roger; Hikavyy, Andriy; Vandeweyer, Tom; Huyghebaert, Cedric; Collaert, Nadine; Thean, Aaron

ISSN

0018-9383

Issue

12

Journal

IEEE Transactions on Electron Devices

Volume

61

Title

Ge-source vertical tunnel FETs using a novel replacement-source integration scheme

Publication type

Journal article

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