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Directed self-assembly process integration – fin patterning approaches and challenges
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Authors
Sayan, Safak
;
Chan, BT
;
Gronheid, Roel
;
Van Roey, Frieda
;
Kim, Min-Soo
;
Williamson, Lance
;
Nealey, Paul
Conference
Advances in Resist Materials and Processing Technology XXXI
Title
Directed self-assembly process integration – fin patterning approaches and challenges
Publication type
Proceedings paper
Embargo date
9999-12-31
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