Directed self-assembly process integration – fin patterning approaches and challenges

Publication:

2014

Proceedings Paper

Author(s)

Sayan, Safak

;

Chan, BT

;

Gronheid, Roel

;

Van Roey, Frieda

;

Kim, Min-Soo

;

Williamson, Lance

;

Nealey, Paul

1914 since deposited on 2021-10-22

1last month

1last week

Acq. date: 2026-09-11