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Directed self-assembly process integration – fin patterning approaches and challenges

dc.contributor.authorSayan, Safak
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.contributor.authorVan Roey, Frieda
dc.contributor.authorKim, Min-Soo
dc.contributor.authorWilliamson, Lance
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-22T05:30:08Z
dc.date.available2021-10-22T05:30:08Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24483
dc.sourceIIOimport
dc.titleDirected self-assembly process integration – fin patterning approaches and challenges
dc.typeProceedings paper
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorVan Roey, Frieda
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage90510M
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXXI
dc.source.conferencedate23/02/2014
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1854371
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 9051


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