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Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly
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Authors
Seidel, Robert
;
Rincon Delgadillo, Paulina
;
Ramirez-Hernandez, Abelardo
;
Wu, Hengpeng
;
Her, Yougnjun
;
Yin, Jian
;
Gronheid, Roel
;
Nealey, Paul
;
de Pablo, Juan
Conference
Advances in Patterning Materials and Processes XXXI
Title
Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly
Publication type
Proceedings paper
Embargo date
9999-12-31
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