Show simple item record

Replicating micro-optical structures using soft embossing technique

dc.contributor.authorShang, Xiaobing
dc.contributor.authorTan, Jin-Yi
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorJoshi, Pankaj
dc.contributor.authorIslamaj, Esma
dc.contributor.authorCuypers, Dieter
dc.contributor.authorVervaeke, Michael
dc.contributor.authorVan Erps, Jurgen
dc.contributor.authorThienpont, Hugo
dc.contributor.authorDe Smet, Herbert
dc.date.accessioned2021-10-22T05:43:41Z
dc.date.available2021-10-22T05:43:41Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24512
dc.sourceIIOimport
dc.titleReplicating micro-optical structures using soft embossing technique
dc.typeProceedings paper
dc.contributor.imecauthorCuypers, Dieter
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.orcidimecCuypers, Dieter::0000-0003-0550-6273
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage92310H
dc.source.conference30th European Mask and Lithography Conference
dc.source.conferencedate24/06/2014
dc.source.conferencelocationDresden Germany
dc.identifier.urlhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2065912
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9231


Files in this item

Thumbnail
Name:
30953.pdf
Size:
536.3Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record