Low-frequency noise assessment of border traps in Al2O3 capped DRAM peripheral MOSFETs

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Authors

Simoen, Eddy; Federico, Antonio; Aoulaiche, Marc; Ritzenthaler, Romain; Schram, Tom; Arimura, Hiroaki; Cho, Moon Ju; Kauerauf, Thomas; Groeseneken, Guido; Horiguchi, Naoto; Thean, Aaron; Crupi, Felice; Spessot, Alessio; Caillat, Chirstian; Fazan, Pierre; Na, Hoon Joo; Son, Yunik; Noh, Kyung Bong

ISSN

0268-1242

Issue

11

Journal

Semiconductor Science and Technology

Volume

29

Title

Low-frequency noise assessment of border traps in Al2O3 capped DRAM peripheral MOSFETs

Publication type

Journal article

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