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Si cap passivation on InGaAs: a route to reduce oxide traps.

dc.contributor.authorSioncke, Sonja
dc.contributor.authorNyns, Laura
dc.contributor.authorVais, Abhitosh
dc.contributor.authorLin, Dennis
dc.contributor.authorFranco, Jacopo
dc.contributor.authorBai, Xue
dc.contributor.authorEl Kazzi, Salim
dc.contributor.authorKunert, Bernardette
dc.contributor.authorPorret, Clément
dc.contributor.authorMaurice, Thibaut
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorCollaert, Nadine
dc.contributor.authorHeyns, Marc
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-22T05:56:25Z
dc.date.available2021-10-22T05:56:25Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24538
dc.sourceIIOimport
dc.titleSi cap passivation on InGaAs: a route to reduce oxide traps.
dc.typeMeeting abstract
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorVais, Abhitosh
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorMaurice, Thibaut
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecVais, Abhitosh::0000-0002-0317-7720
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewno
dc.source.beginpagena
dc.source.conferenceIEEE Semiconductor Interfaces Specialist Conference - SISC
dc.source.conferencedate10/12/2014
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec


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