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Characterization of directed self-assembly process using grazing incidence small angle X-ray scattering

dc.contributor.authorSuh, Hyo-Seon
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorChen, Xuenxuen
dc.contributor.authorWan, Lingshu
dc.contributor.authorJiang, Zhang
dc.contributor.authorStrzalka, Joseph
dc.contributor.authorWang, Jin
dc.contributor.authorChen, Wei
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-22T06:12:56Z
dc.date.available2021-10-22T06:12:56Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24572
dc.sourceIIOimport
dc.titleCharacterization of directed self-assembly process using grazing incidence small angle X-ray scattering
dc.typeOral presentation
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewno
dc.source.conferenceSPIE Advanced Lithography Conference
dc.source.conferencedate24/02/2014
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


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