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Stuffing-enabled confinement of self-assembled monolayer used as sealing agent on plasma-exposed 2.0 p-OSG films

dc.contributor.authorSun, Yiting
dc.contributor.authorLevrau, Elisabeth
dc.contributor.authorZhang, Liping
dc.contributor.authorGeypen, Jef
dc.contributor.authorFranquet, Alexis
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorBender, Hugo
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorDe Feyter, Steven
dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-22T06:15:58Z
dc.date.available2021-10-22T06:15:58Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24578
dc.sourceIIOimport
dc.titleStuffing-enabled confinement of self-assembled monolayer used as sealing agent on plasma-exposed 2.0 p-OSG films
dc.typeMeeting abstract
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorLevrau, Elisabeth
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewno
dc.source.conference23rd Conference on Materials for Advanced Metallization - MAM
dc.source.conferencedate2/03/2014
dc.source.conferencelocationChemnitz German
imec.availabilityPublished - imec


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